Study on Ultrasonic-assisted Femtosecond Laser Ablation Mechanism and Process of Silicon Carbide Ceramics

LIN Yingliang; CHEN Xiaoxiao; MA Chenbin; LI Qi; ZHANG Wenwu

doi:10.3969/j.issn.1004-132X.2026.08.022

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Study on Ultrasonic-assisted Femtosecond Laser Ablation Mechanism and Process of Silicon Carbide Ceramics

更新时间：2026-11-05

- Study on Ultrasonic-assisted Femtosecond Laser Ablation Mechanism and Process of Silicon Carbide Ceramics
- China Mechanical Engineering Vol. 37, Issue 8, Pages: 2029-2037(2026)
- 作者机构：
  
  1.宁波大学机械工程与力学学院,宁波,315211
  2.中国科学院宁波材料技术与工程研究所,宁波,315201
  3.中国科学院大学,北京,100049
  4.浙江工业大学机械工程学院,杭州,310023
- 作者简介：
- 基金信息：
- DOI：10.3969/j.issn.1004-132X.2026.08.022
  CLC： TN249
- Received：26 August 2025，
  
  Published：25 August 2026
- 稿件说明：
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林颖亮，陈晓晓，马晨斌，等.碳化硅陶瓷超声辅助飞秒激光烧蚀机理与工艺研究［J］.中国机械工程，2026，37（8）：2029-2037.LIN Yingliang，CHEN Xiaoxiao，MA Chenbin，et al.Study on Ultrasonic-assisted Femtosecond Laser Ablation Mechanism and Process of Silicon Carbide Ceramics［J］.China Mechanical Engineering，2026，37（8）：2029-2037.

LIN Yingliang,CHEN Xiaoxiao,MA Chenbin,et al.Study on Ultrasonic-assisted Femtosecond Laser Ablation Mechanism and Process of Silicon Carbide Ceramics[J].China Mechanical Engineering,2026,37(8):2029-2037.
林颖亮，陈晓晓，马晨斌，等.碳化硅陶瓷超声辅助飞秒激光烧蚀机理与工艺研究［J］.中国机械工程，2026，37（8）：2029-2037.LIN Yingliang，CHEN Xiaoxiao，MA Chenbin，et al.Study on Ultrasonic-assisted Femtosecond Laser Ablation Mechanism and Process of Silicon Carbide Ceramics［J］.China Mechanical Engineering，2026，37（8）：2029-2037. DOI： 10.3969/j.issn.1004-132X.2026.08.022.

LIN Yingliang,CHEN Xiaoxiao,MA Chenbin,et al.Study on Ultrasonic-assisted Femtosecond Laser Ablation Mechanism and Process of Silicon Carbide Ceramics[J].China Mechanical Engineering,2026,37(8):2029-2037. DOI： 10.3969/j.issn.1004-132X.2026.08.022.

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Study on Ultrasonic-assisted Femtosecond Laser Ablation Mechanism and Process of Silicon Carbide Ceramics

DOI：10.3969/j.issn.1004-132X.2026.08.022